Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14481324
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Filing Dt:
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09/09/2014
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Publication #:
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Pub Dt:
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03/26/2015
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Inventors:
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Masaki Ohashi, Masahiro Fukushima, Tomohiro Kobayashi, Ryosuke Taniguchi
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Title:
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SULFONIUM SALT, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| WESTERMAN, HATTORI, DANIELS&ADRIAN, LLP. |
| 1250 CONNECTICUT AVE., NW |
| SUITE 700 |
| WASHINGTON, DC 20036 |
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