Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/24/2017
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Application #:
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14056673
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Filing Dt:
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10/17/2013
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Publication #:
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Pub Dt:
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04/23/2015
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Inventors:
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Ying-Hsueh CHANGCHIEN, Yu-Ming Lee, Chi-Ming Yang
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Title:
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METHOD OF SELECTIVELY REMOVING SILICON NITRIDE AND ETCHING APPARATUS THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, SCIENCE-BASED |
| INDUSTRIAL PARK, |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET, N.W. |
| WASHINGTON, DC 20001 |
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