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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9953826
Issue Dt:
04/24/2018
Application #:
14539174
Filing Dt:
11/12/2014
Publication #:
20150128994
Pub Dt:
05/14/2015
Inventors:
Miyako KANEKO, Keiji TANOUCHI, Takehiko ORII, Itaru KANNO, Meitoku AIBARA, Satoru TANAKA
Title:
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY MEDIUM
Assignment: 1
Reel/Frame:
034157/0455Recorded: 11/12/2014Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KANEKO, MIYAKO
Exec Dt:
10/30/2014
TANOUCHI, KEIJI
Exec Dt:
10/30/2014
ORII, TAKEHIKO
Exec Dt:
10/30/2014
KANNO, ITARU
Exec Dt:
11/04/2014
AIBARA, MEITOKU
Exec Dt:
10/24/2014
TANAKA, SATORU
Exec Dt:
10/24/2014
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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