Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/03/2017
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Application #:
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14536069
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Filing Dt:
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11/07/2014
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Publication #:
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Pub Dt:
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05/14/2015
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Inventors:
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Anshuman Cherala, Seth J. Bamesberger, Mario Johannes Meissl, Byung-Jin Choi
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Title:
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LOW CONTACT IMPRINT LITHOGRAPHY TEMPLATE CHUCK SYSTEM FOR IMPROVED OVERLAY CORRECTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1807-C WEST BRAKER LN STE 300 |
| AUSTIN, TEXAS 78758 |
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| CANON NANOTECHNOLOGIES, INC. |
| PO BOX 81536 |
| AUSTIN, TX 78708-1536 |
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