Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/31/2017
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Application #:
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14158112
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Filing Dt:
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01/17/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Inventors:
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Wendell BOYD JR., Vijay D. PARKHE, Matthew BUSCHE, Konstantin MAKHRATCHEV, Masanori ONO et al
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Title:
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CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FORCES APPLIED BY ELECTROSTATIC CHUCKS, AND RELATED METHODS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP/APPM |
3040 POST OAK BLVD. |
SUITE 1500 |
HOUSTON, TX 77056-6582 |
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