Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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14094361
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Filing Dt:
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12/02/2013
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Publication #:
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Pub Dt:
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06/04/2015
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Inventors:
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Alexander I. ERSHOV, David Evans, Matthew Graham
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Title:
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APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| SAN DIEGO, CALIFORNIA 92127 |
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| ARENT FOX LLP |
| 1717 K STREET NW |
| WASHINGTON, DC 20036 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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