Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14625628
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Filing Dt:
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02/19/2015
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Publication #:
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Pub Dt:
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06/11/2015
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Inventors:
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Chun-Ting HOU, Dongliang Daniel SHEU
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Title:
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Operating Method of Slit Valve for Semiconductor Wafer Processing Chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| #101, SECTION 2, KUANG FU ROAD, |
| HSIN CHU CITY, TAIWAN 30013 |
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| CHIH FENG YEH |
| 188 OLD CASTLE POINT ROAD |
| WAPPINGERS FALLS, NY 12590-7069 |
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