Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2016
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Application #:
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14138007
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Filing Dt:
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12/21/2013
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Publication #:
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Pub Dt:
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06/25/2015
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Inventors:
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Fang-Hao Hsu, Hsu-Sheng Yu, Kuo-Feng Lo, Hong-Ji Lee
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Title:
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METHOD OF CONTROLLING CONTACT HOLE PROFILE FOR METAL FILL-IN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 16, LI-HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN |
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| STOUT, UXA, BUYAN & MULLINS LLP |
| 4 VENTURE, SUITE 300 |
| IRVINE, CA 92618 |
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