Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/2018
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Application #:
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14572087
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Filing Dt:
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12/16/2014
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Publication #:
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Pub Dt:
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07/02/2015
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Inventors:
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Lin Xu, Hong Shih, Nash Anderson, Tom Stevenson, John Daugherty, John Michael Kerns et al
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Title:
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COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACES OF A COMPONENT OF A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN INGERSOLL & ROONEY PC - LAM RES |
| 1737 KING STREET, SUITE 500 |
| ALEXANDRIA, VA 22314 |
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