Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/13/2018
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Application #:
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14146996
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Filing Dt:
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01/03/2014
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Publication #:
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Pub Dt:
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07/09/2015
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Inventors:
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Kuo-Shu TSENG, Chien-Hua CHEN, You-Feng CHEN, Yen-Yu CHEN, Zhong-Yi CHEN, Yung-Haw LIAW
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Title:
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METHOD FOR CONTROLLING EXHAUST FLOW IN WAFER PROCESSING MODULE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| MCCLURE, QUALEY & RODACK, LLP |
| 400 INTERSTATE NORTH PARKWAY SE |
| SUITE 200 |
| ATLANTA, GA 30339 |
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