Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14169528
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Filing Dt:
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01/31/2014
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Publication #:
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Pub Dt:
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08/06/2015
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Inventors:
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Michael D. Willwerth, Chih-Hsun Hsu, Valentin N. Todorow
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Title:
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ELECTROSTATIC CHUCK WITH MAGNETIC CATHODE LINER FOR CRITICAL DIMENSION (CD) TUNING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| JUSTIN K. BRASK |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085-4040 |
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