Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2017
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Application #:
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14337953
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Filing Dt:
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07/22/2014
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Publication #:
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Pub Dt:
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09/03/2015
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Inventors:
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Gowri Kamarthy, Yoshie Kimura, Baosuo Zhou, John Hoang, Monica Titus, Harmeet Singh et al
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Title:
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METHOD OF PLANARIZING AN UPPER SURFACE OF A SEMICONDUCTOR SUBSTRATE IN A PLASMA ETCH CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN INGERSOLL & ROONEY PC - LAM RES |
| 1737 KING STREET, SUITE 500 |
| ALEXANDRIA, VA 22314 |
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