Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/17/2017
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Application #:
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14645258
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Filing Dt:
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03/11/2015
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Publication #:
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Pub Dt:
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09/17/2015
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Inventors:
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Samuel S. Pak, Sang In Lee, Daniel Ho Lee, Hyoseok Daniel Yang
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Title:
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CLEANING OF DEPOSITION DEVICE BY INJECTING CLEANING GAS INTO DEPOSITION DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3191 LAURELVIEW COURT |
| FREMONT, CALIFORNIA 94538 |
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| DOHYUN AHN |
| FENWICK & WEST LLP |
| 801 CALIFORNIA STREET |
| MOUNTAIN VIEW, CA 94041 |
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