Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14696063
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Filing Dt:
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04/24/2015
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Publication #:
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Pub Dt:
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11/19/2015
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Inventors:
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Kenneth Regan, Robert K. Becker, Christopher K. Olsen, Yan Shao
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Title:
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METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 900 MIDDLESEX TURNPIKE, BLDG. 6 |
| BILLERICA, MASSACHUSETTS 01821 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 3455 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD |
| AUSTIN, TX 78741 |
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