Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/14/2017
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Application #:
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14727857
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Filing Dt:
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06/01/2015
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Publication #:
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Pub Dt:
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11/26/2015
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Inventors:
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Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White et al
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Title:
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Transmission Line RF Applicator for Plasma Chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| ROBERT J. STERN |
| 3074 HARCROSS RD |
| REDWOOD CITY, CA 94062-2321 |
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