Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/2017
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Application #:
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14766981
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Filing Dt:
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08/10/2015
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Publication #:
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Pub Dt:
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12/10/2015
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Inventors:
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Katsuhiko Kawabata, Takuma Hayashi, Mitsumasa Ikeuchi, Sungjae Lee, Jin Kunika
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Title:
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SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ANALYSIS METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-39-5-916, FUJIMIDAI, KUNITACHI-SHI |
| TOKYO, JAPAN 186-0003 |
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| ROBERTS & ROBERTS, LLP, ATTORNEYS AT LAW |
| P.O. BOX 484 |
| PRINCETON, NJ 08542-0484 |
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