Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/30/2017
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Application #:
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14740928
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Filing Dt:
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06/16/2015
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Publication #:
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Pub Dt:
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12/17/2015
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Inventors:
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Yoshito Fujii, Shinji Ebisu, Tetsuya Kudo, Suguru Hirokawa, Keiji Okada
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Title:
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ION IMPLANTATION APPARATUS AND CONTROL METHOD FOR ION IMPLANTATION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, OSAKI 2-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN 141-6025 |
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| FISHMAN STEWART YAMAGUCHI PLLC |
| 1233 20TH STREET N.W., SUITE 501 |
| WASHINGTON, DC 20036 |
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