Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/02/2017
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Application #:
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14688739
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Filing Dt:
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04/16/2015
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Publication #:
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Pub Dt:
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12/24/2015
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Inventors:
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Timothy Goodwin, Lena Nicolaides, Mohan Mahadevan, Paul Horn, Shifang Li
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Title:
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Automated Inline Inspection of Wafer Edge Strain Profiles Using Rapid Photoreflectance Spectroscopy
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| 14301 FNB PARKWAY |
| SUITE 220 |
| OMAHA, NE 68154-5299 |
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