Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/22/2018
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Application #:
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14804604
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Filing Dt:
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07/21/2015
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Publication #:
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Pub Dt:
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01/28/2016
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Inventors:
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Satoshi SHIMAMOTO, Yoshiro HIROSE, Ryuji YAMAMOTO
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING FORMING A FILM CONTAINING A FIRST ELEMENT, A SECOND ELEMENT AND CARBON, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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| GERALD B. HALT, JR. |
| VOLPE & KOENIG |
| 30 SOUTH 17TH STREET |
| PHILADELPHIA, PA 19103 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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