Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/10/2019
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Application #:
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14755646
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Filing Dt:
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06/30/2015
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Publication #:
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Pub Dt:
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01/28/2016
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Inventors:
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S. M. REZA SADJADI, JIE ZHOU, CHUNLEI ZHANG, HAITAO WANG, TZA-JING GUNG et al
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Title:
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SYSTEMS AND METHODS FOR ELECTRICAL AND MAGNETIC UNIFORMITY AND SKEW TUNING IN PLASMA PROCESSING REACTORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| MOSER TABOADA/ALAN TABOADA |
| 1030 BROAD STREET |
| SUITE 203 |
| SHREWSBURY, NJ 07702 |
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