Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/10/2016
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Application #:
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14799374
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Filing Dt:
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07/14/2015
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Publication #:
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Pub Dt:
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02/18/2016
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Inventors:
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Bok Hoen KIM, Li Yan MIAO, Christopher Dennis BENCHER, Huixiong DAI, Daniel Lee DIEHL et al
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Title:
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METHOD FOR CRITICAL DIMENSION REDUCTION USING CONFORMAL CARBON FILMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KEITH TACKETT |
| 24 GREENWAY PLAZA |
| SUITE 1600 |
| HOUSTON, TX 77046 |
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