Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/17/2017
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Application #:
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14463605
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Filing Dt:
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08/19/2014
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Publication #:
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Pub Dt:
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02/25/2016
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Inventors:
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Vahan A. Senekerimyan, Michael A. Purvis, Jie L. Ding
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Title:
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MINIMIZING GRAZING INCIDENCE REFLECTIONS FOR RELIABLE EUV POWER MEASUREMENTS HAVING A LIGHT SOURCE COMPRISING PLURAL TUBES WITH CENTERLINES DISPOSED BETWEEN A RADIATION REGION AND CORRESPONDING PHOTODETECTOR MODULES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROPERTY DEPT., M/S 4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| CYMER, LLC/MPG, LLP |
| 17075 THORNMINT COURT |
| M/S 4-2D |
| SAN DIEGO, CA 92127-2413 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| 5504 DR |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| PETER B. MARTINE |
| 710 LAKEWAY DR. |
| STE. 200 |
| SUNNYVALE, CA 94085 |
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