Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/06/2018
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Application #:
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14939787
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Filing Dt:
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11/12/2015
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Publication #:
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Pub Dt:
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03/03/2016
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Inventors:
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Ajay KUMAR, Omkaram NALAMASU, Banqiu WU, Kartik RAMASWAMY
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Title:
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METHODS AND APPARATUS FOR CONTROLLING PHOTORESIST LINE WIDTH ROUGHNESS WITH ENHANCED ELECTRON SPIN CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON + SHERIDAN, LLP |
| 595 SHREWSBURY AVE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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