Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/2017
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Application #:
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14831961
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Filing Dt:
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08/21/2015
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Publication #:
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Pub Dt:
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03/03/2016
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Inventors:
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Shigehiro MIURA, Hitoshi KATO, Jun SATO, Hiroyuki KIKUCHI
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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| IPUSA, P.L.L.C |
| 1054 31ST STREET, N.W. |
| SUITE 400 |
| WASHINGTON, DC 20007 |
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