Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/16/2017
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Application #:
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14823015
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Filing Dt:
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08/11/2015
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Publication #:
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Pub Dt:
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03/24/2016
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Inventors:
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Osamu IIZUKA, Kenji OHTOSHI
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Title:
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METHOD OF MEASURING BEAM POSITION OF MULTI CHARGED PARTICLE BEAM, AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8-1, SHIN SUGITA CHO, ISOGO-KU |
YOKOHAMA, KANAGAWA, JAPAN 235-8522 |
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OBLON, ET AL. |
1940 DUKE STREET |
ALEXANDRIA, VA 22314 |
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05/21/2024 01:55 PM
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