Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/10/2017
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Application #:
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14837229
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Filing Dt:
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08/27/2015
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Publication #:
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Pub Dt:
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03/24/2016
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Inventors:
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Hiroki Miyai, Masafumi Shinoda
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Title:
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INSPECTION APPARATUS, COORDINATE DETECTION APPARATUS, COORDINATE DETECTION METHOD, AND WAVEFRONT ABERRATION CORRECTION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-10-1 SHIN-YOKOHAMA, KOHOKU-KU |
| YOKOHAMA, KANAGAWA, JAPAN 222-8552 |
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| ALLEMAN HALL MCCOY RUSSELL & TUTTLE LLP |
| 806 SW BROADWAY |
| SUITE 600 |
| PORTLAND, OR 97205-3335 |
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