Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14964023
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Filing Dt:
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12/09/2015
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Publication #:
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Pub Dt:
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04/07/2016
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Inventors:
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Gokhan HATIPOGLU, Srinivas TADIGADAPA
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Title:
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ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 304 OLD MAIN |
| UNIVERSITY PARK, PENNSYLVANIA 16802 |
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| GREGORY A. NELSON |
| 997 LENOX DRIVE |
| BUILDING 3 |
| LAWRENCEVILLE, NJ 08648 |
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