Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/08/2018
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Application #:
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14514222
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Filing Dt:
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10/14/2014
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Publication #:
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Pub Dt:
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04/14/2016
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Inventors:
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Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Dmitry Lubomirsky, Jiayin Huang
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Title:
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SYSTEMS AND METHODS FOR INTERNAL SURFACE CONDITIONING ASSESSMENT IN PLASMA PROCESSING EQUIPMENT
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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KILPATRICK TOWNSEND & STOCKTON LLP |
TWO EMBARCADERO CENTER, 8TH FLOOR |
ATTN: JOHN LINDEMANN |
SAN FRANCISCO, CA 94111 |
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