Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/18/2017
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Application #:
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14984891
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Filing Dt:
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12/30/2015
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Publication #:
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Pub Dt:
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04/21/2016
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Inventors:
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Aijun ZENG, Liqun CHEN, Ruifang FANG, Huijie HUANG
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Title:
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ILLUMINATION SYSTEM FOR LITHOGRAPHIC PROJECTION EXPOSURE STEP-AND-SCAN APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 390, QINGHE ROAD, JIADING |
| SHANGHAI, CHINA 201800 |
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| MANNI LI MEI & MARK LLP |
| 433 NORTH CAMDEN DRIVE, SUITE 400 |
| BEVERLY HILLS, CA 90210 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6TH FLOOR, BUILDING 52, ROOM 601-10, 2 JINGYUAN NORTH STREET, BEIJING ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE |
| BEIJING, CHINA 100176 |
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| MANNI LI MEI & MARK LLP |
| 433 NORTH CAMDEN DRIVE, SUITE 400 |
| BEVERLY HILLS, CA 90210 |
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