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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9520301
Issue Dt:
12/13/2016
Application #:
14819904
Filing Dt:
08/06/2015
Publication #:
20160111298
Pub Dt:
04/21/2016
Inventors:
Gon-jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho et al
Title:
ETCHING METHOD USING PLASMA, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE INCLUDING THE ETCHING METHOD
Assignment: 1
Reel/Frame:
036269/0696Recorded: 08/06/2015Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KIM, GO-JUN
Exec Dt:
07/20/2015
VOLYNETS, VLADIMIR
Exec Dt:
07/16/2015
AN, SANG-JIN
Exec Dt:
07/13/2015
YANG, HEE-JEON
Exec Dt:
07/13/2015
LEE, SANGHEON
Exec Dt:
07/13/2015
CHO, SUNG--KEUN
Exec Dt:
07/13/2015
CHEN, XINGLONG
Exec Dt:
07/14/2015
CHOI, IN-HO
Exec Dt:
07/13/2015
Assignee:
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 443-742
Correspondent:
MYERS BIGEL SIBLEY & SAJOVEC
PO BOX 37428
RALEIGH, NC 27627

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