Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/19/2019
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Application #:
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14880077
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Filing Dt:
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10/09/2015
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Publication #:
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Pub Dt:
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04/28/2016
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Inventors:
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Dzmitry Sanko, Siddharth Srivastava, Stilian Ivanov Pandev, Wei Lu
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Title:
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SIGNAL RESPONSE METROLOGY FOR IMAGE BASED AND SCATTEROMETRY OVERLAY MEASUREMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| JOSEPH S SPANO |
| 851 BURLWAY ROAD, SUITE 407 |
| BURLINGAME, CA 94010 |
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