Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14986070
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Filing Dt:
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12/31/2015
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Publication #:
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Pub Dt:
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04/28/2016
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Inventors:
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Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson
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Title:
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CAPACITIVELY COUPLED PLASMA SOURCE FOR ABATING COMPOUNDS PRODUCED IN SEMICONDUCTOR PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP -- APPLIED TX |
| 24 GREENWAY PLAZA |
| SUITE 1600 |
| HOUSTON, TX 77046 |
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