Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/13/2017
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Application #:
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14995897
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Filing Dt:
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01/14/2016
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Publication #:
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Pub Dt:
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05/12/2016
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Inventors:
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Daisuke Fujita, Makoto Suyama, Naohiro Yamamoto, Masato Ishimaru, Kentaro Yamada
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Title:
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PLASMA ETCHING METHOD
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Assignment:
1
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CHANGE OF NAME AND ADDRESS
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| 17-1, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MATTINGLY & MALUR PC |
| 1800 DIAGONAL ROAD |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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