Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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14944640
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Filing Dt:
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11/18/2015
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Publication #:
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Pub Dt:
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06/02/2016
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Inventors:
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Ryoh KAWANA, Yasuo KATO
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Title:
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MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE CHARGED PARTICLE BEAM PATTERN WRITING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, SHIN SUGITA CHO, ISOGO-KU |
| YOKOHAMA, KANAGAWA, JAPAN 235-8522 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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