Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/15/2019
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Application #:
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14968346
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Filing Dt:
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12/14/2015
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Publication #:
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Pub Dt:
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06/23/2016
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Inventor:
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Taro IKEDA
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Title:
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PLASMA PROCESSING APPARATUS WITH SHOWER PLATE HAVING PROTRUSION FOR SUPPRESSING FILM FORMATION IN GAS HOLES OF SHOWER PLATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST ST. |
| 34249U_JLM/ALS |
| ALEXANDRIA, VA 22314 |
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