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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9865472
Issue Dt:
01/09/2018
Application #:
15134144
Filing Dt:
04/20/2016
Publication #:
20160233102
Pub Dt:
08/11/2016
Inventors:
Robert CHEBI, Frank LIN, Jaroslaw W. WINNICZEK, Wan-Lin CHEN, Erin MOORE, Lily ZHENG et al
Title:
FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL
Assignment: 1
Reel/Frame:
038436/0508Recorded: 05/02/2016Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ZHENG, LILY
Exec Dt:
04/26/2016
LASSIG, STEPHAN
Exec Dt:
04/01/2016
CHEBI, ROBERT
Exec Dt:
03/28/2016
LIN, FRANK
Exec Dt:
03/23/2016
WINNICZEK, JAROSLAW W.
Exec Dt:
03/23/2016
CHEN, WAN-LIN
Exec Dt:
03/24/2016
MOORE, ERIN
Exec Dt:
03/28/2016
BOGART, JEFF
Exec Dt:
03/28/2016
RUSU, CAMELIA
Exec Dt:
03/28/2016
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
BEYER LAW GROUP LLP
P.O. BOX 51887
PALO ALTO, CA 94303

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