Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/06/2018
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Application #:
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15024084
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Filing Dt:
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03/23/2016
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Publication #:
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Pub Dt:
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08/11/2016
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Inventors:
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Yusuke Futamata, Hiromi Hara, Toshiyuki Shiokawa, Takami Satoh, Takahiro Furukawa et al
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Title:
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ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-6325, JAPAN |
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| ABELMAN, FRAYNE & SCHWAB/LEE |
| 666 THIRD AVENUE |
| 10TH FLOOR |
| NEW YORK, NY 10017-5621 |
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