Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
2
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2018
|
Application #:
|
14675659
|
Filing Dt:
|
03/31/2015
|
|
Publication #:
|
|
Pub Dt:
|
10/06/2016
| | | | |
|
Inventors:
|
Monica Titus, Saravanapriyan Sriraman, Alex Paterson
|
|
Title:
|
GAS REACTION TRAJECTORY CONTROL THROUGH TUNABLE PLASMA DISSOCIATION FOR WAFER BY-PRODUCT DISTRIBUTION AND ETCH FEATURE PROFILE UNIFORMITY
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
|
|
| JOSE M. NUNEZ |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
|
|
|
Assignment:
2
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
|
|
| JOSE NUNEZ |
| 710 LAKEWAY DR. |
| STE. 200 |
| SUNNYVALE, CA 94085 |
|
|
Search Results as of:
05/21/2024 07:04 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
