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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/08/2018
Application #:
15141946
Filing Dt:
04/29/2016
Publication #:
Pub Dt:
11/03/2016
Inventors:
Jun MATSUSHITA, Takashi MIYAMOTO, Konosuke HAYASHI, Osamu YAMAZAKI
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
038417/0249Recorded: 04/29/2016Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/25/2016
Exec Dt:
04/25/2016
Exec Dt:
04/25/2016
Exec Dt:
04/25/2016
Assignee:
5-1, KASAMA 2-CHOME, SAKAE-KU
YOKOHAMA-SHI, KANAGAWA, JAPAN 247-8610
Correspondent:
RYAN W. O'DONNELL
VOLPE AND KOENIG, P.C.
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, PA 19103

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