Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/2019
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Application #:
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14836574
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Filing Dt:
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08/26/2015
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Publication #:
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Pub Dt:
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11/24/2016
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Inventors:
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Cheng-Tsung WU, Po-Hsiung LEU, Ding-I LIU, Si-Wen LIAO, Hsiang-Sheng KUNG
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Title:
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METHOD AND SYSTEM FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE ROAD |
| SUITE 100E |
| FALLS CHURCH, VA 22040 |
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