Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14750714
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Filing Dt:
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06/25/2015
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Publication #:
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Pub Dt:
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12/29/2016
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Inventors:
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Nash W. ANDERSON, Thomas R. STEVENSON, Lin XU, John DAUGHERTY, John Michael KERNS
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Title:
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USE OF PLASMA-RESISTANT ATOMIC LAYER DEPOSITION COATINGS TO EXTEND THE LIFETIME OF POLYMER COMPONENTS IN ETCH CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303-1887 |
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