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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
15198649
Filing Dt:
06/30/2016
Publication #:
20170002463
Pub Dt:
01/05/2017
Inventors:
Nai-Wen Fan, Shau-Yi Chen, Ai-Sen Liu, Chi-Chung Kei, Chien-Pao Lin, Wen-Hao Cho et al
Title:
SHOWERHEAD AND A THIN-FILM DEPOSITION APPARATUS CONTAINING THE SAME
Assignment: 1
Reel/Frame:
047168/0140Recorded: 10/15/2018Pages: 22
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
FAN, NAI-WEN
Exec Dt:
07/04/2016
CHEN, SHAU-YI
Exec Dt:
03/16/2018
LIU, AI-SEN
Exec Dt:
07/04/2016
KEI, CHI-CHUNG
Exec Dt:
03/16/2018
LIN, CHIEN-PAO
Exec Dt:
03/16/2018
CHO, WEN-HAO
Exec Dt:
03/16/2018
CHEN, FONG-ZHI
Exec Dt:
03/19/2018
KUO, CHIEN-CHENG
Exec Dt:
08/25/2016
CHAN, SHIH-HAO
Exec Dt:
08/01/2016
CHEN, CHIH-HAO
Exec Dt:
07/12/2016
PENG, WEI-CHIH
Exec Dt:
03/16/2018
HSU, CHIA-LIANG
Exec Dt:
03/16/2018
Assignee:
EPISTAR CORPORATION
5 LI-HSIN 5TH RD., SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondent:
MUNCY, GEISSLER, OLDS & LOWE, P.C.
4000 LEGATO ROAD
SUITE 310
FAIRFAX, VA 22033

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