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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
14788621
Filing Dt:
06/30/2015
Publication #:
Pub Dt:
01/05/2017
Inventors:
Fayaz Shaikh, Taide Tan
Title:
Separation of Plasma Suppression and Wafer Edge to Improve Edge Film Thickness Uniformity
Assignment: 1
Reel/Frame:
035989/0572Recorded: 07/01/2015Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/30/2015
Exec Dt:
06/30/2015
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
JAYANTHI MINISANDRAM
710 LAKEWAY DRIVE
SUITE 200
FREMONT, CA 94085

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