Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14800583
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Filing Dt:
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07/15/2015
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Publication #:
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Pub Dt:
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01/19/2017
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Inventors:
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Lin XU, Hong SHIH, John DAUGHERTY, Satish SRINIVASAN, Siwen LI
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Title:
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USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER COMPONENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303-1887 |
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