Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2017
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Application #:
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14820422
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Filing Dt:
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08/06/2015
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Publication #:
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Pub Dt:
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02/09/2017
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Inventors:
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David Benjaminson, Dmitry Lubomirsky, Shubham Chourey, Ananda Seelavanth Math et al
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Title:
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BOLTED WAFER CHUCK THERMAL MANAGEMENT SYSTEMS AND METHODS FOR WAFER PROCESSING SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| EUGENE J. BERNARD |
| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER - 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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