Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15238175
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Filing Dt:
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08/16/2016
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Publication #:
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Pub Dt:
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02/23/2017
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Inventors:
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Lukas Urban, Sandeep Krishnan
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Title:
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PROCESS-SPECIFIC WAFER CARRIER CORRECTION TO IMPROVE THERMAL UNIFORMITY IN CHEMICAL VAPOR DEPOSITION SYSTEMS AND PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1 TERMINAL DRIVE |
| PLAINVIEW, NEW YORK 11803 |
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| BRAD PEDERSEN |
| 80 SOUTH EIGHTH STREET |
| 4800 IDS CENTER |
| MINNEAPOLIS, MN 55402 |
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