Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15122638
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Filing Dt:
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08/31/2016
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Publication #:
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Pub Dt:
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03/09/2017
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Inventors:
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Mirko KEHR, Daniel DECKER, Hermann SCHLEMM, Erik ANSORGE
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Title:
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Device for Processing Plasma with a Circulation of Process Gas in Multiple Plasmas
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AN DER BAUMSCHULE 6-8 |
| HOHENSTEIN-ERNSTTHAL, GERMANY 09337 |
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| MICHAEL SODERMAN |
| TAUENTZIENSTR 9-12 |
| BERLIN, 10789 GERMANY |
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