Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/17/2019
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Application #:
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15353088
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Filing Dt:
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11/16/2016
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Publication #:
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Pub Dt:
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05/25/2017
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Inventor:
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Koichi TAKEDA
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Title:
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CALIBRATION METHOD OF SUBSTRATE POLISHING APPARATUS, CALIBRATION APPARATUS OF THE SAME, AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM FOR RECORDING CALIBRATION PROGRAM OF THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN 144-8510 |
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| LEYDIG, VOIT & MAYER, LTD |
| TWO PRUDENTIAL PLAZA, SUITE 4900 |
| 180 NORTH STETSON AVENUE |
| CHICAGO, IL 60601-6731 |
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