Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/22/2019
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Application #:
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15402368
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Filing Dt:
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01/10/2017
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Publication #:
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Pub Dt:
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05/25/2017
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Inventors:
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Joachim Schulz, Guenther Krauss, Matthias Wissert
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Title:
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AMPLIFYING PULSED LASER RADIATION FOR EUV RADIATION PRODUCTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| JOHANN-MAUS-STRASSE 2 |
| DITZINGEN, GERMANY D-71254 |
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| YUNBO GUO |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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