Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/13/2018
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Application #:
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15322566
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Filing Dt:
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12/28/2016
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Publication #:
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Pub Dt:
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06/01/2017
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Inventors:
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Kazunari Watanabe, Izuru Shikata
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Title:
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DIAPHRAGM VALVE, FLUID CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2, ITACHIBORI 2-CHOME, NISHI-KU |
| OSAKA-SHI, OSAKA, JAPAN 550-0012 |
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| LOCKE LORD LLP |
| P.O. BOX 55874 |
| BOSTON, MA 02205 |
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